You may want to try Lamda-Physik (http://www.lambdaphysik.com/). They do laser
beam machining on Silicon and Glass with hole diameters down to 1um. In the web
page - look under Service & Support / Applications Lab Capabilities. Hope this
helps.
Debjyoti.
mems-talk-request@memsnet.org wrote:
> Message: 6
> From: "Danny Klein"
> To:
> Date: Mon, 24 Sep 2001 14:34:17 +0200
> Subject: [mems-talk] Making small diameter holes in glass
>
> This is a multi-part message in MIME format.
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> Dear MEMS colleagues,
>
> As a part of my thesis I am interested in making several small =
> diameter holes (100-200 micron) in a thin layer of glass (400-500 =
> micron), along a 20 mm line. Then I need to fill the holes with gold or =
> any other metal.
> I would like to know if anyone knows any methods to drill or etch =
> those holes in glass ( Pyrex, BK-7, CdTe, BaF2 or any other material =
> that allows transmission in the visible and IR wavelengths as well).
> I would appreciate if anyone can tell me of a manufacturer that can make =
> these holes.=20
> =20
> P.S. I choose glass because of its relative high thermal isolation =
> property.
>
> Thank you in advance,
>
> Danny Klein
>
> -----------------------------------------------------
>
> Danny Klein
> Faculty of Mechanical Engineering
> Technion, Israel Institute of Technology
> Haifa, 32000
> Israel
>
> Tel: 972-4-8292946
> Email: dannykl@tx.technion.ac.il
>
> ----------------------------------------------------
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>
>
>
Dear MEMS colleagues,
>
>
As a part of my thesis I =
> am=20
> interested in making several small diameter holes (100-200 micron) in a =
> thin=20
> layer of glass (400-500 micron), along a 20 mm line. Then I need to fill =
> the=20
> holes with gold or any other metal.
>
I would like to know =
> if anyone=20
> knows any methods to drill or etch those holes in glass ( Pyrex, =
> BK-7,=20
> CdTe, BaF2 or any other material that allows transmission in the visible =
> and=20
> IR wavelengths as well).
>
I would appreciate if anyone can tell me =
> of a=20
> manufacturer that can make these holes.
>
>
P.S. I choose glass because of =
> its relative=20
> high thermal isolation property.