bonding pyrex to silicon with a thin optical coating in between
Ben Jian
2001-10-30
Hi,
We are trying to bond a pyrex wafer to a silicon wafer for optical
application. Between the pyrex and silicon, there must be a 1500 Angstrom
Niobium (Nb) oxide layer (which can be sputtered on either wafer). Can someone
suggest a reliable process for full wafer bonding? We prefer not to have
organic material in the process. Thanks.
Regards.
BJ