Looking for info on optical absorption data of photoreists
(PMMA, etc.)
Xinbing Liu
2001-11-01
Hi,
I'm looking for some info on optical transmission data on various e-beam
lithography or photolithography resist materials, such as PMMA. I'm
particularly interested materials that have high UV absorption when
developed.
Any response would be appreciated. If I receive enough responses, I'll
summarize here.
Xinbing Liu