Hello,
I have to put Al contacts on a Si mesa structure which is of 1.3 um in
height. I would like to do planarisation on the substrate (Si) with respect
to the mesa structure such that i could reduce the height. Can any one
suggest me how to do the planarization and the right polymer to be used for
this.
_________
____Al______ |
| | |
| |1.3| um
| |___|______
_________| |____Al_____
Substrate
____________________________________
Thanking you all in advance,
Ajey Jacob.
_________________________________________________________________
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