Ziggy,
Do you know what your surface roughness is ?
Maurice H. Norcott
Senior Technician
Silicon Genesis Corporation
590 Division Street
Campbell, CA 95008
408-871-3948 Office
408-977-6333 Pager
Mnorcott@Sigen.com
-----Original Message-----
From: Zigurts Majumdar [mailto:majumdar@uiuc.edu]
Sent: Wednesday, December 26, 2001 6:11 PM
To: mems-talk@memsnet.org
Subject: [mems-talk] glass-glass bonding
HI, Does anyone have a detailed protocol for bonding glass to glass? We
have been trying to bond while maintaining an optical quality surface
(pure thermal bonding doesn't seem to work) and we haven't had luck with
applying a voltage across the glass with temp around 400 degrees. We're
using pyrex right now (borofloat, specifically). Any suggestion would be
appreciated.
Thanks,
Ziggy
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