SU-8 is chemically attacked by KOH and can probably
not be used for your purpose.
Greetings,
Frank Berauer
Senior R&D Engineer
Hewlett-Packard Singapore
-----Original Message-----
From: Charles Lakeman [mailto:clakeman@tplinc.com]
Sent: 4 January 2002 01:41
To: mems-talk@memsnet.org
Subject: [mems-talk] SU-8 chemical compatibility
Does anyone know the compatibility of SU-8 with conc. KOH solutions? We are
not using KOH as an etchant, but need a means of containing small quantities
of a KOH-based gel. Thanks.
Charles Lakeman
TPL Inc.
Albuquerque NM
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