> From: "WLODEK KAPLAN -1023"
> Organization: IMC AB
> To: "CHRISTIAN VIEIDER -1055"
> Date: Tue, 2 Jul 1996 13:07:48 CET
> Subject: (Fwd) MEMS flow sensors
> From: "John S. Buan"
> Subject: MEMS flow sensors
> Date: Thu, 27 Jun 96 11:21:31 -0500
> To: MEMS@ISI.EDU
> Reply-to: mems@ISI.EDU
>
> Hi,
>
>
> I am looking for a directional flow sensor which has a response time on the
> order of milliseconds and comes in a small package (< 2 mm). It has to work
in
> a high flow ambient, say 4 liters/sec, but does not have to quantitatively
> measure the flow, just sense directional changes. Does anyone know of any
> existing products. Thanks for your time.
>
>
> Sincerely,
>
>
> John Buan
>
> John S. Buan
> Minnesota Innovative
> Technologies and Instruments Corp.
> 603 Washington Ave. SE #503
> Mpls., MN 55414-2950
> buan0001@gold.tc.umn.edu
> phone: (612) 626-1541
> fax: (612) 625-0558
>
>
>
Hello
We have worked with the development and production of a thermal gas flow
sensor where the sensing part is applied on the top of a thin silicon beam.
The beam is 2 mm long, 0,5 mm wide and 30um thick. Including the
bonding pads the overall size is 3,5 mm x 2,3 mm. The sensor has been
used to measure air flows in the range of 0,05 - 50 m/s with a response time of
25 us. This product has not been designed for directional measurement but
from a research project we have larger sensor chips that can be used.
(6 x 4 x 0,5 mm, see proceedings from Transducers 95 vol 2 pp428)
More detailed information can be given if wanted.
Christian Vieider
IMC-Industrial Microelectronics Center
Isafjordsgatan 22 P.O.Box 1084
S-164 21 KISTA - SWEDEN
Phone +46 8 7521055 Fax +46 8 7505430 e-mail Christian.Vieider@imc.kth.se