Hi all,
Recently I have been facing some adhesion problems
regarding sputtered TaN film on 5 mil (thick) quartz
substrates. I do not see similar issues when sputtered
on alumina and other ceramics.
Does anyone have any insight to the nature of this
problem and any plausible solution.
thank you,
regards,
adnan
Send FREE video emails in Yahoo! Mail!
http://promo.yahoo.com/videomail/