any way to get a better surface roughness of 45-V-groove?
Oscar Hui
2002-01-19
hi...............all...............
i am using TMAH, Methanol, IPA, H20 as a solvent to etch silicon wafer,
so as to get a 45-V-groove.
however, the surface finish is not good, there are some stripes along
the 45 degree slanted plane.
any suggestion to get a a better surface roughness of 45-V-groove?
thanks heartily,
oscar