any method to measure residul stress in bonding membrane
li shifeng
2002-01-25
Hi, friendsI am interest to measure the residual stress in glass membrane
after Si-Glass bonding. As i know, eventhough thermal coefficient is
pretty closed between silicon and Preyx7740, there is some stress left
after bonding. The residual stress affects membrane vibriation
performance somehow.Anyone has done similar experiment before or has the
same idea? maybe you can share some information. any information
will appreciated. thanksshifeng
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