thermal expansion coefficients and Young's
modulus
Greg Mattiussi
2002-01-28
> Where can I find resources on thermal coefficient of expansions and
Young's
> modulus for thin films? In particular, PE Oxide, SOG, BPSG, PE SiN,
and
> thermal oxide.
One good reference is Chen et. al., J. Vac. Sci. Technol. B 18(6),
Nov/Dec 2000, pp. 2826 - 2834
Cheers,
Greg Mattiussi
Spectalis Corp.