Dear MEMS community,
I am trying to make a PZT(Lead Zirconate Titanate) actuator and I want to
deposit a thick layer of PZT on Silicon. I am looking for an easy and simply
process and I believe the sol-gel method can be a good solution.
I seek your suggestions for a good method of the sol-gel process. Any
recommendations for an alternate process is also welcome.
Thanks
Ashish Singh