Hello Jim,
As an excellent introduction to MEMS I recommend : Nadim Maluf, An
Introduction to Microelectromechanical Systems Engineering, Artech House.
For current information check out www.smalltimes.com and the mstnews
newsletter www.mstnews.de (in english). I can also recommend
www.dynamicsilicon.com and the japanese MICROMACHINE Magazine
www.mmc.or.jp/magazine.htm (free PDF). Also, check out the ETIP/ATIP
newletters www.etip.org / www.atip.org - that'll keep you busy for a while.
Regards,
-- Werner