It's actually low. 0.0035 micron/min at 85C
Best Regards,
Rafiqul Islam
EV Group Inc.- Technology- Tel: (602) 437 9492 x 118, (602)2842134
(cell),Fax: (602) 437 9435,
e-mail: R.Islam@EVGroup.com web: www.EVGroup.com
-----Original Message-----
From: Brian Semak [mailto:bse@hymite.com]
Sent: Friday, February 08, 2002 6:13 AM
To: mems-talk@memsnet.org
Subject: [mems-talk] Si (111) etch rates
I would like to know if anyone has done or know of some results of the etch
rate of 111 planes in silicon, in KOH. The values I've found in the
litterature seems to low.
Med venlig hilsen/Kind regards
Brian S. Semak, M.Sc. (Phys.)
R&D Hermetic Packaging
Hymite Aps
DTU, Bygn. 325, 1st floor
2800 Lyngby
Telephone(Direct): + 45 4525 9147
Fax: + 45 4525 9156
E-mail: BSE@hymite.com
www.hymite.com
_______________________________________________
mems-talk@memsnet.org mailing list: to unsubscribe or change your list
options, visit http://mail.mems-exchange.org/mailman/listinfo/mems-talk
Hosted by the MEMS Exchange, providers of MEMS processing services.
Visit us at http://www.mems-exchange.org/