Alok,
10um+ SOI Device layer is actually quite thin. Normal BE-SOI ( as
opposed to SIMOX) can be easily produced with thickness of 5um to 200um
on device with 2um Box.( 3um Box is doable,but slightly lower yield)
SEnd me an email on the details and I will see what I can do to help.
Regards,
Ken Smith
Kmbh Associates
4968 Charter Road
Rocklin, CA 95765 U S A
510-714-5055 Efax- 510 217 4421 or 561 658 6136
Alok Paranjpye wrote:
> Hi Everyone,
> I'm looking for bonded SOI wafers with a thick (10um+) top Si layer and 2-3
> um BOX layer. I haven't been able to find any vendor that makes such thick
> Si layers. I'd be grateful for any leads on this, or if somebody could tell
> me what is the thickest Si layer available out there.
> Thanks!!
> Alok Paranjpye
> Graduate Student Researcher
> Mechanical & Environmental Engg.
> University of California
> Santa Barbara 93016
> Ph: 805-893-5341
> Fax: 805-893-8651