Hi,
I need to remove about 60 nm thick of GaAs from a GaAs wafer. I read
that GaAs can be wet etched in H2O2/H2SO4 solutions, but the etch rate
seems too high for me, couple of microns per minute. Does anyone have a
recipe for slow etch so I can control the thickness removed? I also
need smooth surface after etching.
Any help is appreciated.
Xinbing Liu