Yes there are at least 2 commercial mask aligners that will align both sides
of the wafer O.A.I. and Quintel. Microchem is the company with the
photoactive compound NANO MX 6C there was a question about yesterday, phone
number 617 965 5511 a good contact is Mark Shaw ext. 308. The same company
may have the answer for thick Polymide. The thickest I have worked with is 80
microns of Polymide but I have worked with 400 micron thick SU8 a negative
acting chemically amplified resist produced by Microchem. Plasma experiments
on bridge structures can be done using my companies horizontal/vertical
plasma, it is designed to sweep under bridges, if I am contacted. Bill
Moffat
-----Original Message-----