Accelerometer Sensor using piezoresistor and cantilever-proof
mass structure

Amin Abdul-Fattah

2002-02-26

Hi ,
I am working on a design of Accelerometer Sensor using full Wheatstone
bridge piezoresistor on a cantilever with a proof mass.
Please inform me where to get precise info on this design. Some of the
ionformation I am looking for is;
* If the bias voltage is 5V, the maximum power dissipation should be 1mW,
resistivity
of the piezoresistor material is 0. 1 Ohm-cm, minimum dimensions are limited
to 5 mm,
and the resistors are uniformly diffused to a depth of 1 mm. What is the
dimensions for
resistors in a bridge circuit.
* What is the appropriate layout for piezoresistors to obtain maximum
sensitivity to
acceleration. Where would longitudinal and transverse resistors be placed so
that they
would have equal magnitude sensitivity to acceleration?
* how to calculate the sensitivity for a design .
Thanks and regrds
Amin