dear sir,
i have done my m.tech in microelectronica and vlsi
design in jan-2002 from iit kharagpur. my m.tech
project was in mems and i am currently on my way to
pursue research in mems in iit kharagpur.
from whatever i know , the integration of mems with
electronics has a lot to do with the process
compatibility of both. This in turn depend on the type
of mems u r interested to work on, because the process
requirements for mems vary from one application to
other.
But in general most of the mems devices can be made by
bulk-micromachining , the advantage being it does not
require special process instruments
and the disadvantage being, the process is not
compatible with ic batch processing.
So the issues related to mems and electronics
integration are very much related to the process
capability of the fab. lab.For mems u may well have to
go for some special process techniques like
LIGA,mumps,summitV each of which require process
equipments like ir mask aligner or double sided mask
aligner etc
regards,
anant narain
Yahoo! Greetings - Send FREE e-cards for every occasion!
http://greetings.yahoo.com