Dear all,
I'm trying to fabricate platinum electrodes on glass or silicon wafers.
Originally, adopting Ti or Cr as adhesion layer can improve the adhesion of
platinum on the substrate, but now my electrodes will be used for
electroanalysis and don't want any active metal. So,
1. Is there any method to deposit platinum directly on glass or silicon with
enough adhesion?
2. Or, if without platinum electrode, is there any other material which is
chemically stable enough patterned on Si or glass to electrolyze water.
Thanks a lot,
Hongjun Zeng
Microfabrication Applications Laboratory (MAL)
University of Illinois at Chicago
ERF Building, 842 W. Taylor Street
Chicago, IL 60607-7022
Room 3014 ERF
Tel.: 312-413-5889, Fax: 312-996-6465