You might want to try AZ MIF 327 Photoresist developer - you might stand
a better chance of etching your Al film - its very slow but works quite
well.
Greg Miller
KVH
-----Original Message-----
From: Hoyin [mailto:hychan@acae.cuhk.edu.hk]
Sent: Monday, March 04, 2002 9:38 AM
To: mems-talk@memsnet.org
Subject: [mems-talk] Problem in etching Al and Pt
Hi all,
I have got a simple question. I want to sacrifically release my =
device by etching Al. However, one of the layer is Pt. Will the Al =
etchant etch Pt ??? What etchant do you suggest??
Thank you very much!!!
Hoyin
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