Regarding the dry selective and isotropic etch for III-V
Parshant Kumar
2002-03-13
Hi All
Can you please suggest me the comapany or Institute
who can do the selective isotropic dry etching of GaAs
for structure layer of AlGaAs.
There are reports that which suggest RIE BCl3/Cl2
combination does the purpose, if any one help me to do
that or suggest me who can help to do that.
parshant
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