I have a question related to the information below- I have in the past
supplied off angle cut 1-0-0 silicon at 9.7 degree for customer
application to allow for 45 degree V-grooves and based on tolerance, I
have question as to what is the min / max v-groove angle using
anisotropic etch ( KOH) based on the +_1 degree tolerance of the 9.7
degree off-cut angle-
Normal on-orientation 1-0-0 silicon prooduce 54.7+_ degree V-grooves for
reference.
Can someone help me to calculate the V-groove angles for 8.7 and 10.7
degree off-cut on the 1-0-0 silicon ( off cut is towards 1-1-0)
Thanks ahead for any information on this.
Regards,
Ken Smith
--
Kmbh Associates
47 Rocket Circle
Rancho Cordova, CA 95742 U S A
510-714-5055 Efax- 510 217 4421 or 561 658 6136
High Purity Float Zone and Specialty CZ Silicon for Power, IR and
Mirror Optics, Optoelectronics, MEMS, SOI, and other Semiconductor
applications. Service in SOI, Polishing SSP and DSP.
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