Hi,
surfing the MEMS web site, I found this interesting abstract:
Silicon Micromachined Devices for in Vivo and In Vitro Studies of Neural
Networks, Thesis by Svetlant Tatic-Lucicc, Doctor of Philosophy in Electrical
Engineering, California Institute of Technology
This the paragraph in which I'm most interested:
"... the novelty of these devices is a neuron well structure fabricated in a
16-20 um-thick silicon membrane using a double-sided micromachining
technique...."
I would appreciate any references, postscript files, bibliography on this
specific subject.
The bottom line is that I want to fabricate a very thick insulating layers on
top of microelectrodes, a very similar application to neural wells, but for a
different purpose.
Thank's in advance
Dr. Giovanni De Gasperis
Experimental Pathology, Box 89
U.T. M.D. Anderson Cancer Center
1515 Holcombe
Houston, TX 77030
Phone: (713)-792-7605
FAX: (713)-792-5940