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MEMSnet Home: MEMS-Talk: SU-8 spinning problems
SU-8 spinning problems
2002-03-15
Glen Landry
2002-03-15
[email protected]
2002-03-15
CLIF HAMEL
2002-03-15
Vic Kley
2002-03-15
Henry Yang
2002-03-15
[email protected]
wafer level vacuum packaging
2002-03-15
Krishna Kashyap
2002-03-15
CLIF HAMEL
SU-8 spinning problems
Glen Landry
2002-03-15
        I have a problem spinning SU-8 2050 photoresist (Microchem corp). When
I place the required amount on my 2" silicon wafer and spin, it does not
spread uniformly. Instead it all goes to one side (if it is not exactly
centered) or it spreads out in a starfish pattern, leaving large portions
of the wafer uncovered.
        I have tried manually spreading the SU-8 across the wafer, with my
pipette, but this introduces bubbles. It was also suggested to tilt the
wafer to get the SU-8 to spread, or to sit it on a table. Neither of these
suggestions worked, since the SU-8 2050 is so viscous and it takes so long
to spread with gravity, a skin forms on the SU-8 before it spreads.

Does anyone have suggestions?

Glen Landry

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