Regarding: Glen Landry
Subject: [mems-talk] SU-8 spinning problems
I had similar difficulties with SU-8. One method that seemed to work for us was
to squeegee a thin layer of SU-8 across the entire substrate. Then immediately
add more resist in the center, the usual amount, and spin. A quick and dirty
solution, but it worked for us and kept my substrates from looking like spin
art. Best of luck to you.
Dara Ruggiero
Harris Corporation