How to get 2" Si wafer and etch 45 degree V-groove?
lib zhou
2002-03-18
Hi,Dear All:
I am interested to know if anyone can send me some information which company
can still sell high quality 2" single-crystal silicon wafer. by the way, I have
an another
question related to (100) Si anisotropic etch by KOH, how can get a 45 (or
135)degree bevel plane at the end of a V-groove, this angle refer to the
inclination of the end bevel plane to the V-groove axes line (or bottom line). I
think the method cuting (100) silicon at 9.7 degree angle can only get the bevel
plane have a 45degree to Si surface, the angle between the bevel plane and the
V-groove bottom line is still -54.7 degree.
Thanks ahead and best regards,
Lib Zhou
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