I am trying to put down a 1000 angstrom layer of Pt without an adhesion
layer onto spin on oxide. In order to promote adhesion I "baked" the
wafer at 700C for about 2 hours (ramped at 10C/min) in a tube furnace
with N2 flow of about 0.5 l/min. When the sample came out it look really
bizarre. Instead of the mirror like finish I'd started with, I've got a
hazy transparent layer. I can see the oxide (defects and all). Was the
temp too high? Metal too thin? Help!
Thanks,
Mike Martin