>Has anyone ever anodically bonded pyrex to both sides? All the
literature
>I read only describes the process for one side.
You can check:
M. Despont et al, "Fabrication of a silicon-Pyrex-silicon stack by A.c.
anodic bonding",
Sensors and Actuators A55 (1996), pp. 219-224.
Adriana Lapadatu, Ph.D.
Technology Development
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