Hi, guys
I have read letter son the web page, so I want you to help me with the
nonuniformity. I met one problem when I spin resist on the Platinum, the resist
is not uniform. I do not make it yet.The resist used is S 1805 photoresist
containing: propylene glycol monomethyl either acetate, and the adhesion
promoter is AP010 HMDS. Would you please give me some suggestions to solve this
problem to get uniform spin coating? Thanks a lot!
Sincerely yours
Penghui Zhao
Deparment of Materils Science
University of North Texas
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