1. Glass wet etching of NaOH, 2. Chemicals to remove OTS
Chang-Hwan Choi
2002-04-04
I have two questions.
1. Does NaOH (Sodium Hydroxide) will etch glass or not? If so, what is the
etch rate?
2. I coated OTS monolayer on Si-Pyrex channel. Now, I want to remove the OTS
from the channel. Is there any method or chemical solution other than O2
plasma etch which can remove the OTS without attacking the Si and Pyrex?
Chang