Dear fellow MEMS Researchers,
I am interested in building a rough fractal jagged resp. uniformAu-surface
with an average roughness of approx. 1um and structureswith an aspect ratio
of aprox. 1 - 2. The adhesive layer is Ti. ButI'm not committed about that.
Under the Ti-Au Layer is Si resp. SiO2.
Do you know a process to realize my project. The layer system is
notimportant. I only need structured Gold on the surface and aopportunity to
contact it resp. to isolate it to the ground.
Greetings,
Thorsten Uelzen Department of Microsystemtechnology
Technical University Hamburg-Harburg