Dear community,
for flexibility reasons, we would like to use Titanium-Nitride (TiN)
as a 20 Ohm/sq resistor film sputtered on top of AlSiCu.
I've searched around the net a lot, but I don't see TiN mentioned
or offered for this kind of application anywhere. Is there anything
really fundamentally wrong with it ? TCE is not an issue here.
thanks for advice
best regards,
klaus
--
(TEEL) Tokyo Electron Europe Limited
PVD Process Support (ex MRC)
Klaus Beschorner Tel +49-7033-45683
Drosselweg 6 Fax +49-7033-45631
71120 Grafenau, Germany Mobile +49-174 315 7754