Yes:
We have done up to 10 microns of polyimide with very high aspect ratios
approx. 87 degrees with good control and endpoint. The system needs to be
equipped with an electrostatic helium backside chuck for cooling, a high
density source for disassociation of oxygen and bias on the lower electrode
for directionality. Couple that with a big turbo pump and you have our new
Crystal etch tool. I will be glad to talk to you in detail about how to
accomplish the polyimide etch.
Bob Henderson
Process Integration,LLC
480-558-1156