DEAR MEMS,
I AM CURRIOUS IF ANYONE HAS SOME GOOD ETCH RATES FOR (110) Si WAFERS USING
KOH? IF SO, WHAT ARE THESE ETCH RATES, PERCENTAGE OF KOH, AND TEMPERATURE OF
ETCH?
ALSO, RECCOMMENDATIONS ON (110) Si WAFER SUPPLIERS WOULD BE APPRECIATED (ie.
PRICE, QTY, QUALITY, ETC. ETC.)
THANKS
CARL