dear fellow
I need to etch AlGaAs and InGaAs layer on GaAs with BCl3/SF6 or
BCl3/CHF3 chemistry
(we had C2F6, Cl2, O2,Ar, N2 too)Do you know something about the gas
:
Ratio % ,sccm ;RF power, pressure to etch
thanks
Arnaud Margolli
DGA - Celar
division DIRAC-TECN
failure analysis -ECE Dep
+ 33 (0) 2 99 42 66 06