Hi all,
we use SU-8 2010 formula supplied by microchem Berlin.
Our usual thickness is 15um, exposure time is 19s (broad band UV,
10mW/cm^2)
We can't get rid of surface cracks.
We tried longer relaxation times, baking in a convection oven, different
exposure times, but none of these led to significantly improved results.
Has anyone some experience if using a UV filter does not also prevent
T-topping, but also reduce cracking?
Thanks a lot,
Mona