Hi,
We need to fill deep trenches (1*10um) etched in the silicon layer of SOI
wafer with a material that has a refraction index close to but different
from that of Si (3.5).
1.Could someone recommend such a material?
2.Could someone recommend the best process - PECVD, LPCVD?
Thanx,
David
_________________________________________________________________
MSN Photos is the easiest way to share and print your photos:
http://photos.msn.com/support/worldwide.aspx