I have always developed PMMA with a mixture of MIBK and IPA -
this web page should help with the mixtures:
http://www.microchem.com/products/pdf/PMMA_Data_Sheet.pdf
Hope this helps,
Greg Miller
KVH Industries
Email: gmiller@kvh.com
-----Original Message-----
From: Haigh, Richard [mailto:R.D.HAIGH@cranfield.ac.uk]
Sent: Wednesday, June 26, 2002 3:31 AM
To: mems-talk@memsnet.org
Subject: [mems-talk] RE: PMMA developers
Hi
I am interested in solvents that can be used for the development of
polymethylmethacrlate photo-resists. Does anyone know of a company that
supplies these. I have an application that requires unhydrous solvents.
Richard Haigh
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