EVG offers a tool to do this type of overlay check. Call the Phoenix
office: 602 437 9492
-----Original Message-----
From: Roger Brennan [mailto:rogerbr@earthlink.net]
Sent: Wednesday, July 31, 2002 9:05 AM
To: mems-talk@memsnet.org
Subject: [mems-talk] Front-to-Back Inspection Microscope
Hi,
I am looking for a method of checking frontside-to-backside alignment at
develop inspect. The photoresist pattern (on both sides of the silicon
wafer) is a little over a micron thick. Years ago, AO (American Optical)
offered such a microscope. All suggestions will be appreciated.
Thanks in advance,
Roger Brennan
Endevco
355 N. Pastoria Avenue
Sunnyvale, CA 94085
(408)-739-3533 ext 204
roger.brennan@endevco.com
1403 Forrestal Ave.
San Jose, CA 95110
(408)-453-0711
rogerbr@earthlink.net
Roger Brennan
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