Re: SV: [mems-talk] CVD deposition of metal needed !
BobHendu@aol.com
2002-08-16
Seems like a bit of a problem for coating in near vertical holes. You might
want to consider a company called Jet Process located in Ct. Their technology
is very low temperature for depositing oxide using their process. Contact
Dick Hart at 203-777-6000 and tell him Bob Henderson sent you. Bob