Hi,folks
I'm trying to measure the mechanical properties of silicon dioxide
microcantilever, such as spring constant, resonant frequency, etc. The geometry
of cantilever is about 200*150*1micron. Do you have suggestions about how to do
the job? What kinds of instruments are needed? I heard that AFM can be used to
measure. I just don't know how? Any opinions will be appreciated. Thanks.
Best regards
Yanjun(David) Tang
Graduate student
Institute for Micromanufacturing
Louisiana Tech University
1401 Tech Farm Rd. Apt. #238, Ruston, LA 71270, USA
Email: yta001@coes.latech.edu
tang_yanjun@yahoo.com
Tel: 1-318-255-5133