Xiaoshan,
I am sorry to tell you that PMMA will not respond to wavelengths above 250 nm.
In fact, it's sensitivity is highest at 220 nm. It is, of course, mostly used
for e-beam or x-ray lithography.
Very Best Regards,
Rob Hardman
617-965-5511 ext.313
rhardman@microchem.com
www.microchem.com
essage: 8
From: "Xiaoshan Zhu"
To:
Date: Wed, 23 Oct 2002 22:12:41 -0600
Subject: [mems-talk] PMMA probelm
Reply-To: mems-talk@memsnet.org
Hi, there,
I'd process PMMA (less than 200nm thickness), but I have no Deep UV (~250nm)
source. For such a PMMA thickness, is it feasible to just use usual UV source(
360nm~410nm) to do exposure?
Hope your reply!
Thanks a lot!
Xiaoshan