Hi all MEMS talk members,
can anybody give me some advise how to bond two silicon wafers together?
Do I need some special wafers for it or can I use common wafers? I would
also appreciate any reliable and good information source about this
problem.
Thanks for your help
Best Regards
Josef Kouba
Louisiana State University
Center foot Advanced Microstructures & Devices
6980 Jefferson Hwy.
Baton Rouge, LA 70806, USA
(225) 578-9371 - Tel.
(225) 578-6954 - Fax.