Hello everyone,
I am etching my mask using a wet chemical etch, my main concern is the under
etch during the mask making.
I am interested in the max. achievable CD. 0.8 - 1 micron slits (glass
lines)
I there any tricks and tip in general you can give me?
Does anybody know a Cr dry-etch service in Europe for 6" reticle. (fast)
Best regards,
Marc van den Boogaart