The first IEEE MEMS Workshop was: 1987' Micro Robots and Teleoperators Workshop Hyannis, Massachusetts, Nov, 9-11,1987 IEEE Catalog Number 87TH0204-8 more info try: IEEE TAB Products Dept. Attn Mr Mike Capaccio 445 Hoes Lane Piscataway , NJ, 08855 - 1331 USA Fax: 00 1 908 981 9667 Phone: ++1.908.562.3900 -regards, as