Greetings!!!! I Have a Question Regarding The Reaction of BN to S
i
Concepcion, Marc
2003-01-06
Greetings!!!! My name is Marc Anthony Concepcion, and I am a Process
Engineer from PerkinElmer Optoelectronics, Philippines.
I am searching on the Internet to confirm my impression that the Boron
Nitride when reacted to Silicon will result as follows:
6BN + 3Si --> 6B + N2 to Si3N4
Am I correct in the equation above??
Please e-mail me your knowledge on this. BN serves as a Source for Boron
Ions. The Boron Ions are P-Dopants to the Silicon Wafer to produce a P-Type
layer.
Thank You.