patternable thick polymer dielectrics other than su8?
Soojin Oh
2003-01-07
I am currently trying to make some structures using
su8 as dielectric layer. Are there any other
patternable polymer dielctric with good dielectric
strength and thermal stability? (about 1 V/micron
dielectric strength or higher) Or is su8 the best for
this kind of application?
Thank you very much.
Soojin from Chapel Hill