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MEMSnet Home: MEMS-Talk: Outgassing during Anodic Bonding
Outgassing during Anodic Bonding
2003-01-10
Svenja Knappe
Outgassing during Anodic Bonding
Svenja Knappe
2003-01-10
Hey.

Does anyone have experience with outgassing during the anodic bonding
process of pyrex to silicon? We are mainly concerned about the production
of oxygen or water.

Thanks,
Svenja


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