Hi MEMS people,
I'm looking for high frequency (GHz) material properties, especially
losses or tangent delta of the following materials:
- PECVD SiN
- LPCVD SiO2 (thermal grown)
- high resistivity Si substrate (1500 Ohm cm e.g.)
thanks,
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Joachim Oberhammer, Dipl.-Ing.
Royal Institute of Technology (KTH) Phone: +46/(0)8 790 6250
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